To further increase the conversion efficiency of wafer-based solar cells, and to make
higher efficiency and low-cost thin-film solar modules, Ascentool works closely with
customers to develop customized thin-film deposition equipment and processes. Our
customers' needs begin with R&D equipment, lead to pilot production and eventually go
to mass production equipment. Designs of our products are supported by the following
critical inventions (covered by granted and pending U.S. and international patents):
Vacuum System Platforms
Thin-film Deposition Sources
Manufacturing Processes
higher efficiency and low-cost thin-film solar modules, Ascentool works closely with
customers to develop customized thin-film deposition equipment and processes. Our
customers' needs begin with R&D equipment, lead to pilot production and eventually go
to mass production equipment. Designs of our products are supported by the following
critical inventions (covered by granted and pending U.S. and international patents):
Vacuum System Platforms
- ROCS Series-- Horizontal in-line systems, suitable for processing crystalline silicon
wafers and glass substrates for thin-film solar applications - V-ROCS Series-- Vertical in-line systems, suitable for high throughput thin-film
solar applications - t-ROCS Series-- Vertical batch systems, featuring low equipment cost and high
materials utilization
Thin-film Deposition Sources
- PVD (physical vapor deposition, including sputtering and evaporation)
- PECVD (plasma enhanced chemical vapor deposition)
These high-performance deposition sources are organically integrated with
matching vacuum system platforms.
Manufacturing Processes
- ChemMask-- One-step in-situ patterning technology, applicable to BIPV (building
integrated photovoltaic) - High-throughput Reactive Sputtering-- Minimum plasma damage reactive
sputtering for oxide and nitride films
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